International ISO Standard ISO5618-2 Fine ceramics (advanced ceramics First edition 2024-04 advanced technical ceramics) Test method for GaN crystal surface defects Part 2: Method for determining etch pit density Ceramiques techniques-Methode d'essai pour les defauts de surfacedescristauxdeGaN- Partie 2: Méthode de détermination de la densite des piqures Referencenumber ISO 5618-2:2024(en) @ISO2024 IS05618-2:2024(en) COPYRIGHTPROTECTEDDOCUMENT @IS02024 All rights reserved. Unless otherwise specified, or required in the context of its implementation, no part of this publication may bereproduced orutilizedotherwise in anyformorbyanymeans,electronicormechanical, includingphotocopying,orpostingon the internet or an intranet, without prior written permission. Permission can be requested from either ISO at the address below orIso'smemberbodyinthecountryoftherequester. ISo copyrightoffice CP401·Ch.deBlandonnet8 CH-1214 Vernier, Geneva Phone:+41227490111 Email:[email protected] Website:www.iso.org Published in Switzerland @IS0 2024-All rights reserved ii

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