ISO INTERNATIONAL STANDARD 11775 First edition 2015-10-01 Surface chemical analysis - Scanning- probe microscopy Determination of cantilever normal spring constants Analyse chimique des surfaces - Microscopie a sonde a balayage Détermination de constantes normales en porte-a-faux de ressort Reference number ISO 11775:2015(E) SO International Organization for Standardization @ IS0 2015 andardization5956617 vided by IHS under ted without license from IHS IS0 11775:2015(E) COPYRIGHTPROTECTEDDOCUMENT IS02015,PublishedinSwitzerland All rights reserved. Unless otherwise specified, no part of this publication may be reproduced or utilized otherwise in any form or by any means, electronic or mechanical, including photocopying, or posting on the internet or an intranet, without prior written permission. Permission can be requested from either ISO at the address below or ISO's member body in the country of the requester. ISO copyright office Ch. de Blandonnet 8 . CP 401 CH-1214 Vernier, Geneva, Switzerland Tel. +41 22 749 01 11 Fax+412274909 47 copyright@iso.org www.iso.org Intenationai br PrganizationforStandardization Not for Resale, 2015/11/30 07:11:26 etworking permitted without license from IHS IS0 11775:2015(E) Contents Page Foreword ..iv Introduction. ..V 1 Scope. .1 2 Normative references ..1 3 Terms and definitions 4 Symbols and abbreviated terms ..2 5 General information ..4 5.1 Background information .4 5.2 Methods for the determination of AFM normal spring constant ..5 6 Dimensional methods to determine kz .5 6.1 General 5 6.2 kz using formulae requiring 3D geometric information .5 6.2.1 Method 5 6.2.2 Measuring the required dimensions and material properties of the cantilever.. 7 6.2.3 Determining kz for the rectangular cantilever. .8 6.2.4 Determining kz for the V-shaped cantilever. .8 6.2.5 kz for the trapezoidal cross-sections. 9 6.2.6 kz to account for coatings. .9 6.3 kz using plan view dimensions and resonant frequency for rectangular tipless cantilevers .10 6.3.1 Determining kz .10 6.3.2 Uncertainty ..11 7 Static experimental methods to determine kz .11 7.1 General .11 7.2 Static experimental method with a reference cantilever .11 7.2.1 Set-up... ..11 7.2.2 Determining kz . 12 7.2.3 Uncertainty .14 7.3 Static experimental method using a nanoindenter .15 7.3.1 General ..15 7.3.2 Determining kz for a tipped or tipless cantilever .15 7.3.3 Uncertainty .16 7.4 Measurement methods .18 7.4.1 Static deflection calibration. .18 8 Dynamic experimental methods to determinekz .18 8.1 General .18 8.2 Dynamic experimental method using thermal vibrations using AFM ..18 8.2.1 Determining kz ..18 8.2.2 Uncertainty .20 Annex A (informative) Inter-laboratory and intra-laboratory comparison of AFM cantilevers. Bibliography .24 iii ee=Zhejian ng Institute of Standardization 5956617 thout license from IHS