ISO INTERNATIONAL STANDARD 14644-13 First edition 2017-06 Cleanrooms and associated controlled environments - Part 13: Cleaning of surfaces to achieve defined levels of cleanliness in terms of particle and chemical classifications Salles propres et environnements maitrises apparentés- Partie 13: Nettoyage des surfaces afin d'obtenir des niveaux de proprete par rapport aux classifications particulaire et chimique Reference number IS0 14644-13:2017(E) os1 International Organization for Standardization @ IS0 2017 HEJIANG INST OF STANDARDIZATION C1 5956617 d without license from IHS IS0 14644-13:2017(E) COPYRIGHTPROTECTEDDOCUMENT IS0 2017, Published in Switzerland All rights reserved. Unless otherwise specified, no part of this publication may be reproduced or utilized otherwise in any form or by any means, electronic or mechanical, including photocopying, or posting on the internet or an intranet, without prior written permission. Permission can be requested from either ISO at the address below or ISO's member body in the country of the requester. ISOcopyrightoffice Ch. de Blandonnet 8 . CP 401 CH-1214 Vernier, Geneva, Switzerland Tel. +41 22 749 01 11 Fax +41 22 749 09 47 copyright@iso.org www.iso.org Intenationaibr PrganizationforStandardization icensee-ZHEJIANG INST OF STANDARDIZoISQ s1.7 - All rights reserved Not for Resale, 2017/9/8 08:53:1 etworking permitted without license from IHS IS0 14644-13:2017(E) Contents Page Foreword ..V Introduction. ...vi 1 Scope. 2 Normative references 3 Terms and definitions 4 General methodology ..3 4.1 Overview .3 4.2 Methodology ..4 5 Object description ..6 6 Cleanliness specifications. .7 7 Determination of initial contamination level .1 7.1 General .1 7.2 Determination of initial contamination level with respect to particle concentration 7 7.3 Determination of initial contamination level with respect to chemical concentration .7 8 Other requirements .8 9 Selection of a cleaning methodology .8 9.1 Selection procedure ..8 9.2 Cleaning methodologies 8 9.2.1 Cleaning method 9.2.2 Categories of cleaning techniques ..8 9.3 Cleaning process. 10 Material compatibility check 11 Cleaning validation ..10 11.1 General. .10 11.2 Cleaning efficiency. .11 11.2.1 Evaluation .11 11.2.2 Cleaning efficiency with respect to particle concentration. .11 11.2.3 Cleaning efficiency with respect to chemical contamination ..12 11.3 Cleaning appropriateness. .13 11.3.1 Assessment. ..13 11.3.2 Cleaning appropriateness with respect to particle concentration ..13 11.3.3 Cleaning appropriateness with respect to chemical concentration ..14 12 Measurement methods .15 12.1 General. .15 12.2 Direct measurement methods .15 12.2.1 General. ..15 12.2.2 Direct measurement methods with respect to SCP ..16 12.2.3 Direct measurement methods with respect to SCC ..16 12.3 Indirectmeasurementmethods .16 12.3.1 General. .16 12.3.2 Indirect measurement methods with respect to SCP ..16 12.3.3 Indirect measurement methods with respect to ScC ..17 13 Documentation. ..17 Annex A (informative) Aspects of cleaning ..18 Annex B (informative) Cleaning methods .19 Annex C (informative) Material compatibility with cleaning agents ..27 Annex D (informative) Cleanliness measurement. ..29 iii nsee=ZHEJIANG INST OF STANDARDIZATION C1 5956617 vided by IHS under license with ISO ed without license from IHS Not for Resale, 2017/9/8 08:53:11