ISO INTERNATIONAL STANDARD 11938 First edition 2012-03-01 Microbeam analysis Electron probe microanalysis Methods for elemental- mapping analysis using wavelength- dispersive spectroscopy AnalyseparmicrofaisceauxAnalyseparmicrosondeélectronique (microsondedeCastaing)-Methodesd'analyseparcartographie élementaireenutilisantlaspectrometrieadispersiondelongueurd'onde Reference number ISO 11938:2012(E) LSO CopyihtInternatinal Organization for Standardization @ISO 2012 without license from IHS Not for Resale ISO11938:2012(E) COPYRIGHTPROTECTEDDOCUMENT ISO2012 All rights reserved. Unless otherwise specified, no part of this publication may be reproduced or utilized in any form or by any means, electronic or mechanical, including photocopying and microfilm, without permission in writing from either IsO at the address below or isO's memberbody in the country of therequester. ISO copyright office Casepostale 56·CH-1211Geneva20 Tel. + 41 22 749 01 11 Fax+ 4122749 09 47 E-mail [email protected] Web www.iso.org Published in Switzerland @ ISO 2012 -All rights reserved No reproduction or r networking permitted without license from IHS Not for Resale ISO11938:2012(E) Contents Page Foreword .iv Introduction 1 Scope 2 Normativereferences 3 Terms and definitions. 4 Procedure of mapping analysis. 4.1 General.... 4.2 Specimen preparation. 4.3 Measurementprocedure 5 Methods for displaying element maps 6 5.1 General..... 6 5.2 RawX-ray intensitymethod 6 5.3 k-value method.. 6 5.4 Calibrationcurvemethod 5.5 Correlation method. 5.6 Matrix correction method. 6 Evaluationofuncertainty. 7 Report. AnnexA(normative)Comparisonofabsorptioneffectsfora lightelement .9 Bibliography 10 ili cense from IHS Not for Resale