TECHNICAL ISO/TR REPORT 16268 First edition 2009-10-01 Surface chemical analysis Proposed procedure for certifying the retained areic dose in a working reference material produced by ion implantation Analyse chimique des surfaces Mode operatoire proposé pour certifier la dose areique retenue dans un materiau de reference de travailproduitparimplantationdions Reference number ISO/TR 16268:2009(E) @ ISO 2009 ISO/TR 16268:2009(E) PDF disclaimer This PDF file may contain embedded typefaces. In accordance with Adobe's licensing policy, this file may be printed or viewed but shall not be edited unless the typefaces which are embedded are licensed to and installed on the computer performing the editing. In accepts no liability in this area. Adobe is a trademark of Adobe Systems Incorporated. Details of the software products used to create this PDF file can be found in the General Info relative to the file; the PDF-creation parameters were optimized for printing. Every care has been taken to ensure that the file is suitable for use by IsO member bodies. In the unlikely event that a problem relating to it is found, please inform the Central Secretariat at the address given below COPYRIGHTPROTECTEDDOCUMENT ISO2009 All rights reserved. Unless otherwise specified, no part of this publication may be reproduced or utilized in any form or by any means, isO's memberbody in the country of the requester. ISO copyright office Case postale 56 . CH-1211 Geneva 20 Tel. + 41 22 749 01 11 Fax + 41 22 749 09 47 E-mail [email protected] Web www.iso.org Published in Switzerland ii @ Iso 2009 - All rights reserved ISO/TR 16268:2009(E) Contents Page Foreword Introductior 1 Scope 2 Normative references. 3 Terms and definitions 4 Symbols and abbreviatedterms... 5 Concept and procedure 5.1 General information ... 5.2 Preparation of the working and transfer reference materials... 5.3 Measurement of retained areic dose in the transfer reference material.... .8 5.4 Compatibility of the working reference material and the surface-analytical method 6 Requirements. 6.1 Reference materials 6.2 Instrumentationrequirements 6.2.1 Ion implanter ... 6.2.2 Wavelength-dispersive X-ray fluorescence spectrometer 6.2.3 Electron microprobe ... 0 6.3 lon-implantation requirements. 10 6.4 Uniformity requirement.. 10 7 Certification.. 10 7.1 Working reference material against the transfer reference material 10 7.2 Transfer reference material against the secondary reference material. 7.3 Retained areic dose of the working reference material.... 11 Annex A (informative) lon implantation 12 Annex B (informative) lon-implantation dosimetry... Annex C (informative) X-ray fluorescence spectrometry. 15 Annex E (informative) Uncertainties in measurements of areic dose 16 Bibliography.... Iso2009-All rights reserved ii